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CHARGED PARTICLE BEAM CURRENT MEASUREMENT APPARATUS
专利权人:
RIKEN
发明人:
WATANABE, Tamaki,FUKUNISHI, Nobushisa
申请号:
WO2017JP27580
公开号:
WO2018025786(A1)
申请日:
2017.07.28
申请国别(地区):
世界知识产权组织国际局
年份:
2018
代理人:
摘要:
In order to measure a current generated on the basis of a charged particle beam intensity with high sensitivity, a charged particle beam current measurement apparatus according to one embodiment of the present invention is provided with: a magnetic core 102; an induction ring 110 that has a superconductor on a surface or a surface layer; and a SQUID sensor 130. The magnetic core and the induction ring are arranged substantially coaxially to each other, and the superconductor of the induction ring conducts a superconductive current through a poloidal-direction path. The SQUID sensor 130 is magnetically coupled to a magnetic flux passing the inside of the magnetic core in a toroidal direction. The beam current measurement apparatus according to the preferred embodiment is further provided with: a shield ring 160 in which a superconductor is formed.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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