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LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
专利权人:
HAMAMATSU PHOTONICS K.K.
发明人:
SAKAMOTO Takeshi,OGIWARA Takafumi
申请号:
US201515301451
公开号:
US2017106476(A1)
申请日:
2015.03.30
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A laser processing device includes a laser light source, a converging optical system, a controller, and a reflective spatial light modulator. The controller and the reflective spatial light modulator, while using an aberration as a reference aberration, the aberration occurring when laser light is converged at a converging position with an amount of aberration correction in a state in which an ideal converging position is shifted by a predetermined distance to a laser light entrance side from the converging position, adjusts the aberration such that a first converging length longer than a reference converging length of the reference aberration is obtained and a first converging intensity less than a reference converging intensity of the reference aberration is obtained, when a modified region is formed within a first region closest to a front face of an object to be processed.
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