The objective of the present invention is to eliminate noise caused by driving a ridge filter and to achieve a uniform dose distribution that is equivalent to the dose distribution obtained by the apparatus disclosed in Japanese Patent Application Laid-Open No. 2007-75245, without making a patient sense discomfort or anxiety.There are provided a ridge filter (6) having a thickness distribution in which the energy that a charged particle beam (1) loses differs depending on the position thereon through which the charged particle beam (1) passes, a deflector (2) that deflects the charged particle beam (1), and a controller that controls the deflector (2) in such a way that the charged particle beam (1) passes through the thickness distribution of the ridge filter (6).本發明之目的係在於消除因為驅動脊形過濾器所帶來的噪音,使之不會對病患造成不舒服或不安全感,且可達成與專利文獻2之裝置所獲得者同等均勻的線量分布。本發明之粒子線照射裝置係具備:脊形過濾器6,具有因帶電粒子射束1所通過之位置而失去之能量不同的厚度分布;偏向器2,用以使帶電粒子射束1偏向;及控制器,用以控制偏向器2,使帶電粒子射束1通過脊形過濾器6之前述厚度分布。1、1a、1b...帶電粒子射束2、3、4、5...偏向電磁鐵6...脊形過濾器7...射束軸