Sample structure analyzing method, transmission electron microscope, and computer-readable non-transitory recording medium

• 收藏
• 分享

专利权人:

Kabushiki Kaisha Toshiba

发明人:

Murakami Takeshi,Akutsu Haruko

申请号：

US201314106352

公开号：

US8841614(B1)

申请日:

2013.12.13

申请国别(地区):

美国

年份:

2014

代理人:

摘要：

In accordance with an embodiment, a sample structure analyzing method includes generating a beam and then applying the beam to a plurality of observation regions on a sample, and acquiring a plurality of diffraction images from the beam which has passed through the sample; and comparing the acquired diffraction images, and judging the difference between the observation regions from the comparison result, or identifying the grain boundary of crystal constituting the sample.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/