PROBLEM TO BE SOLVED: To provide a ZnO target material in which a volume resistivity of a transparent conductive film obtained by deposition is low, and transmittance in a near-infrared region is high, and dispersion of a sheet resistance is little; and to provide a transparent conductive film deposited by using the same.SOLUTION: A ZnO target material contains Al as much as 1 wt% or more and below 5 wt% in terms of AlO, Si as much as 0.005 wt% or more and below 0.05 wt% in terms of SiO, and Mg as much as 0.005 wt% or more and below 0.1 wt% in terms of MgO. A transparent conductive film is deposited by using the ZnO target material.
