PROBLEM TO BE SOLVED: To enhance flexibility of the shape and the size of treatable objects to be irradiated and to effectively suppress leakage of X-rays generated from the electron beam irradiation part to the outside. SOLUTION: The electron beam irradiation apparatus comprises an irradiation chamber vessel 22 which uses an X-ray shielding material, a main carrier device 24 carrying an object to be carried in it, an electron beam accelerator 26 irradiating the object 2 with an electron beam 28, an inlet carrier 40 and an outlet carrier 50 for carry in and carry out of the object 2, through openings 30 and 32 provided in the irradiation chamber vessel 22. The inlet carrier 40 and the outlet carrier 50 are constituted individually by using the X-ray shield material and connecting with connectors 42 and 52, a plurality of carrier vessels 44 and 54 carrying the object 2 in the inside.