It arranges the suffering sterilization body inside the vacuum container and decompresses inside the vacuum container (S100). When it judges and (S102), arrives whether or not it arrived in 3Pa, the cutoff valve which is allotted between the vacuum container and the vacuum blower is closed (S104). High-frequency power was supplied to the electrode and (S106), 0.1 seconds, the oxygen gas was introduced into the vacuum container and (S108), after that pressure 3 seconds was made fixed and until it judges and (S112), becomes whether or not (S110), the inside of the vacuum container arrived in 10kPa, 10kPa S108 - S112 are repeated. When it reaches to 10kPa, opening the cutoff valve, it decompresses inside the vacuum container and (S114), stops the supply of high-frequency power (S116). It repeats S100 - S118, resets after the 90 minutes elapsing and inside the vacuum container to atmospheric pressure (S120).被滅菌体を真空容器内に配置し真空容器内を減圧する(S100)。3Paに到達したか否かを判断し(S102)、到達したら、真空容器と真空ポンプの間に配されたカットオフバルブを閉鎖する(S104)。高周波電力を電極に供給し(S106)、0.1秒間、酸素ガスを真空容器内に導入し(S108)、その後3秒間圧力を一定とし(S110)、真空容器内が10kPaに到達したか否かを判断し(S112)、10kPaになるまでS108~S112を繰り返す。10kPaに達したら、カットオフバルブを開放して真空容器内を減圧し(S114)、高周波電力の供給を停止する(S116)。S100~S118を繰り返し、90分経過後、真空容器内を大気圧に戻す(S120)。
