A mixed sterilization apparatus using hydrogen peroxide and ozone, comprising:a sterilization chamber (2) which holds a sterilization subject and is sealed from outsidean ozone provider (3) which converts an oxygen-containing substance outside the sterilization chamber (2) or oxygen contained inside the sterilization chamber (2) and provides the converted ozone into the sterilization chamber (2)a vacuumization accelerator (4) which vacuumizes the inside of the sterilization chamber (2) anda hydrogen peroxide vaporizer (51) which vaporizes hydrogen peroxide and provides it into the sterilization chamber (2),wherein the vacuumization accelerator (4) comprises:an ozone decomposer (7) which decomposes the ozone inside the sterilization chamber (2) anda hydrogen peroxide decomposer (6) which decomposes the hydrogen peroxide inside the sterilization chamber (2).
