A method for sterilization according to the present invention comprises: a firststerilization step of providing a sterilization subject in a sealed sterilizationchamber and sterilizing the sterilization subject by providing ozone insidethe sterilization chamber； a first decomposition step of decomposing the ozoneinside the sterilization chamber； a first vacuumization step discharging thegas inside the sterilization chamber and reducing the pressure inside the sterilizationchamber； a second sterilization step of providing hydrogen peroxide into thevacuumized sterilization chamber to sterilize the sterilization subject；a third sterilization step of providing ozone into the sterilization chamber；a second decomposition step of decomposing the hydrogen peroxide and ozone insidethe sterilization chamber； and a second vacuumization step of discharging thegas inside the sterilization chamber and reducing the pressure inside the sterilizationchamber.
