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HYBRID MEMS MICROFLUIDIC GYROSCOPE
专利权人:
Julius GEORGIOU;Charalambos Michael ANDREOU
发明人:
Julius GEORGIOU,Charalambos Michael ANDREOU
申请号:
US15688052
公开号:
US20180045514A1
申请日:
2017.08.28
申请国别(地区):
US
年份:
2018
代理人:
摘要:
A hybrid MEMS microfluidic gyroscope is disclosed. The hybrid MEMS microfluidic gyroscope may include a micro-machined base enclosure having a top fluid enclosure, a fluid sensing enclosure and a bottom fluid enclosure. The hybrid MEMS microfluidic gyroscope may include a plurality of cantilevers disposed within the bottom semi-circular portion of the micro-machined base enclosure or a single membrane disposed within the bottom semi-circular portion of the micro-machined base enclosure.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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