SPECTRAL DATA PROCESSING DEVICE AND SPECTRAL DATA PROCESSING METHOD

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专利权人:

CANON INC

发明人:

IWASAKI KOTA , TSUZUKI EIJU

申请号：

JP20140099899

公开号：

JP2015025800(A)

申请日:

2014.05.13

申请国别(地区):

日本

年份:

2015

代理人:

摘要：

PROBLEM TO BE SOLVED: To provide a spectral data processing device capable of shortening the time required to analyze principal components of spectral data. ! SOLUTION: A spectral data processing device 6 for processing the spectral data acquired for each of a plurality of regions in a sample comprises an analysis unit 13 which analyzes principal components of spectral data. The analysis unit acquires an eigenvector by analyzing principal components of first spectral data in a first region of the plurality of regions, and analyzes principal components of second spectral data in a second region different from the first region of the plurality of regions using the acquired eigenvector. ! COPYRIGHT: (C)2015,JPO&INPIT

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/