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ATMOSPHERIC PRESSURE PLASMA GENERATOR, AND WORKPIECE PAIR PROCESSING MACHINE
专利权人:
Fuji Machine Mfg. Co., Ltd.
发明人:
IKEDO, Toshiyuki,JINDO, Takahiro
申请号:
EP20140884286
公开号:
EP3116289(A1)
申请日:
2014.03.03
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
An atmospheric pressure plasma generator including: a housing; a first region provided in the housing; a gas heater that causes a heated first processing gas to flow into the first region; a second region provided in the housing adjacent to the first region; a gas cooler that causes a cooled second processing gas to flow into the second region; a plasma generating electrode provided in the second region; a plasma generator that plasmarizes the first processing gas present in the first region using the plasma generating electrode; and an outlet through which plasma gas plasmarized by the plasma generator is ejected.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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