To acquire image information at even intervals in the center portion while maintaining the accuracy of the irradiation position of the measurement light when scanning the measurement light so as to draw a figure similar to the Lissajous figure.SOLUTION: First scanning means for reciprocally scanning light in a first direction in a first cycle on an object to be inspected, first scanning means for reciprocally scanning light in a first direction in a first cycle, Second scanning means for reciprocally scanning light in a second direction which is different from the first direction, a second scanning means including a region in which the forward scan and the backward scan of light are changed, and a first Control means for controlling the first scanning means and the second scanning means so that light is scanned through the region of the first scanning region and the second region where the variation of the light scanning speed is smaller than the first region, And an image generating means for generating an image of the object to be inspected by using the information obtained from the return light from the object to be inspected which is irradiated with the object.(FIG.【課題】リサージュ図形に類似の図形を描くように測定光を走査する際に、該測定光の照射位置の精度を維持して中央部分でも画像情報を均等な間隔で取得する。【解決手段】被検査物上で、第1の周期で第1の方向に光を往復走査する第1の走査手段と、被検査物上で、第1の周期の整数倍でない第2の周期で第1の方向とは異なる第2の方向に光を往復走査する第2の走査手段と、光の往路走査と復路走査とが変更される領域を含み且つ光の走査速度を変化させる第1の領域と光の走査速度の変化が第1の領域よりも小さい第2の領域とが光により走査されるように、第1の走査手段および第2の走査手段を制御する制御手段と、光が照射された被検査物からの戻り光より得られた情報を用いて被検査物の画像を生成する画像生成手段と、を撮像装置に配する。【選択図】図4
