PROBLEM TO BE SOLVED: To correct alignment of an unprocessed substrate with high accuracy without increasing the number of steps. SOLUTION: A substrate transfer apparatus 100 of the present invention is an apparatus for transferring one unprocessed substrate W1 loaded on a standby position (point A) to a rotary coating unit 20 (point B). The substrate transfer apparatus includes a transfer fork 40, a shift mechanism 50, a lifting mechanism 60 and a gas jet mechanism 70. The transfer fork 40 has tines 42 supporting both side edges of a rear face of the unprocessed substrate W1. On a top face of the tine 42, a hook 44 to be engaged with a corner of the unprocessed substrate W1 on an upstream side of a transfer direction thereof is formed. The shift mechanism 50 reversibly shifts the transfer fork 40 in the transfer direction. The lifting mechanism 60 lifts the transfer fork 40 up and down. The gas jet mechanism 70 jets a gas upward from the top face of the transfer fork 40. COPYRIGHT: (C)2013,JPO&INPIT
