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APPARATUS AND METHOD FOR DETECTING THE FOCUS POSITION OF AN OPTICAL SYSTEM
专利权人:
发明人:
TRIEBEL PETER,KITTELMANN OLAF
申请号:
IN3733/KOLNP/2008
公开号:
IN272016B
申请日:
2008.09.12
申请国别(地区):
IN
年份:
2016
代理人:
摘要:
An apparatus and a method are presented for detecting the focal position of an optical system (10) with a radiation source (12), a focusing imaging system (16), an at least partially reflective surface (18) on the focus (18a), a digital camera (24) for recording an image reflected by said surface (18), a computer (C) for evaluating the image recorded by the camera (24), and with an optical element (34 36) in the beam path of the optical system (10) upstream of the focusing imaging system (16), which element influences said image depending on the focal position.
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中国工程科技知识中心
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