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Methods, systems, and computer program product for implementing DRC clean multi-patterning process nodes with lateral fills in electronic designs
专利权人:
Cadence Design Systems, Inc.
发明人:
Ruehl Roland,Arkhipov Alexandre,Powell Giles V.,Sharma Karun
申请号:
US201514675516
公开号:
US9904756(B1)
申请日:
2015.03.31
申请国别(地区):
美国
年份:
2018
代理人:
Vista IP Law Group, LLP
摘要:
Disclosed are techniques for implementing DRC clean multi-patterning process nodes with lateral fills. These techniques identify design rules governing multi-patterning and track patterns by accessing a rule deck to retrieve the design rules, identify a first shape and a second shape sandwiching a space and characteristics of the first and second shapes by examining design data of the electronic design, insert one or more lateral fill shapes in the space by implementing the one or more lateral fill shapes along one or more routing tracks of a legal track pattern while automatically complying with the design rules, and perform post-lateral fill or post-layout operations to improve the layout and to prepare the layout for manufacturing.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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