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SEMICONDUCTOR DEVICE HAVING BURIED GATE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME, MEMORY CELL HAVING THE SAME AND ELECTRONIC DEVICE HAVING THE SAME
专利权人:
SK hynix Inc.
发明人:
KANG Dong-Kyun,CHO Ho-Jin
申请号:
US201816021959
公开号:
US2018308850(A1)
申请日:
2018.06.28
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
A semiconductor device includes a substrate comprising a trench; a gate dielectric layer formed over a surface of the trench; a gate electrode positioned at a level lower than a top surface of the substrate, and comprising a lower buried portion embedded in a lower portion of the trench over the gate dielectric layer and an upper buried portion positioned over the lower buried portion; and a dielectric work function adjusting liner positioned between the lower buried portion and the gate dielectric layer; and a dipole formed between the dielectric work function adjusting liner and the gate dielectric layer.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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