PROBLEM TO BE SOLVED: To accurately control an irradiation amount of charged-particle beams.SOLUTION: A charged-particle beam irradiation device 100 includes: a scanning magnet 3 for scanning a charged-particle beam R on an object 52 to be irradiated an irradiation amount setting part 11 for setting the irradiation amount of the charged-particle beam R at each of target scanning positions on scanning lines L of the charged-particle beam R scanned on the object to be irradiated by the scanning magnet 3 and a scanning speed setting part 11 for setting target scanning speed of the charged-particle beam at each of the target scanning position based on the set irradiation amount.COPYRIGHT: (C)2012,JPO&INPIT【課題】荷電粒子線の照射量を精度良く制御する。【解決手段】荷電粒子線照射装置100は、荷電粒子線Rを被照射物52上にて走査する走査磁石3と、走査磁石3により被照射物上にて走査される荷電粒子線Rの走査ラインL上の各目標走査位置における荷電粒子線Rの照射量を設定する照射量設定部11と、設定された照射量に基づき、目標走査位置のそれぞれにおける荷電粒子線の目標走査速度を設定する走査速度設定部11と、を備える。【選択図】図3
