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Optical sensor for detecting chemical, biochemical or biological substances
专利权人:
发明人:
Anjin Liu,Werner Hofmann,Dieter Bimberg
申请号:
US14559456
公开号:
US09693715B2
申请日:
2014.12.03
申请国别(地区):
US
年份:
2017
代理人:
摘要:
An optical sensor for detecting chemical, biochemical or biological substances includes a laser and a semiconductor chip. The sensor includes at least one photodetector and at least one high-contrast grating that are monolithically integrated in the semiconductor chip. The high-contrast grating is configured to optically couple radiation emitted by the laser into the photodetector. The coupling behavior of the high-contrast grating depends on the optical properties of external substances that are brought near to or in contact with the high-contrast grating.
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