PROBLEM TO BE SOLVED: To provide an inspection device, capable of inspecting the shapes of the notch and hole determined in a design specification and the almost spontaneously generated flaw in the edge of a through-hole formed by the processing of the through-hole using a single inspection device. SOLUTION: The inspection device of the glass substrate is constituted so that a glass substrate is stopped on the way of a glass substrate feed device to be illuminated by the illuminator on the straight line, arranged at right angles with respect to the feed direction of the glass substrate and the images of the notch and through-hole formed in the corner of the glass substrate are captured by the camera, which is moved in parallel with the glass substrate in the direction right-angled to the feed direction of the glass substrate and of which the optical axis is turned vertically with respect to the glass substrate, to binarize the captured image by an image processor. This inspection device is used to inspect the size and the shape of the notch, the position and size of the through-hole and flaws in the edge of the through-hole. COPYRIGHT: (C)2006,JPO&NCIPI
