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ELECTRON MICROSCOPE AND PHOTOGRAPHING METHOD OF TRANSMISSION ELECTRON IMAGE IN ELECTRON MICROSCOPE
专利权人:
JEOL LTD
发明人:
OKURA YOSHIHIRO
申请号:
JP20000349222
公开号:
JP2002150987(A)
申请日:
2000.11.16
申请国别(地区):
日本
年份:
2002
代理人:
摘要:
PROBLEM TO BE SOLVED: To provide an electron microscope, where an electron beam will not irradiate photographing visual field at focus-adjustment. SOLUTION: When a visual field is searched for, the central control means 19 sends a magnetizing signal C0 to a focusing lens control circuit 16, in order to make the magnetized state of the second focusing lens 5 the same as the magnetized state, at photographing. Furthermore, the central control means 19 sends a scanning signal S0 for letting the electron beam scan on the sample 11 to a deflecting coil control circuit 18. In this way, since a transmission electron image is obtained by the electron beam scanning at searching for the visual field as for this invention of the electron microscope, the magnetized state remains unchanged from searching for the visual field up to the photographing time. Because of this, even if the search for the visual field proceeds to the focus-adjustment, a deflection field due to hystericis which has been generated before will not be generated, and since the electron beam will not hit the photographing visual field by a mistake at focus-adjustment as in conventional cases, the visual field will not damaged prior to photographing, and proper sample photographing can be performed.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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