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Electron energy filter for transmission electron microscope
专利权人:
HITACHI, LTD., TOKIO/TOKYO, JP
发明人:
TANIGUCHI, YOSHIFUMI, HITACHINAKA, IBARAKI, JP,TAYA, SHUNROKU, MITO, IBARAKI, JP
申请号:
DE19951026999
公开号:
DE19526999(A1)
申请日:
1995.07.24
申请国别(地区):
德国
年份:
1996
代理人:
摘要:
The electron energy filter admits an electron beam with a spread of energies, and emits a beam of electrons only within a special energy band. The electron energy filter contains a pair of yokes (1a, 1b) set close together, such that multiple pole pieces ( e.g. 2b, 3b) on the yoke surfaces are set at a fixed separation. The filter also contains an electron beam channel in the yokes, and exciting coils (11, 12) to generate the magnetic field between the pole pieces. An incoming electron beam at one end of the electron beam channel is bent between the pole pieces and emerges at the other end of the channel (62).
来源网站:
中国工程科技知识中心
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