PROBLEM TO BE SOLVED: To provide an ultrasonic probe having a piezoelectric element which is excellent in adhesion between a vibrating plate and platinum and high in voltage resistance.SOLUTION: An ultrasonic probe includes: an element chip 17 and a housing for supporting the element chip 17. The element chip 17 includes a vibrating film 43, a bottom electrode 24, and a piezoelectric film 26 formed on the bottom electrode 24. The bottom electrode 24 is laminated on the vibrating film 43 via an adhesion film 24b. The bottom electrode 24 is made of platinum or an alloy containing platinum and the adhesion film 24b is made of titanium whose film thickness is 80Å or less.COPYRIGHT: (C)2016,JPO&INPIT【課題】振動板と白金との密着性が良く耐電圧の高い圧電素子を備えた超音波プローブを提供する。【解決手段】素子チップ17と、素子チップ17を支持する筐体と、を備え、素子チップ17は振動膜43と下部電極24と、この下部電極24上に形成された圧電体膜26と、を備え、下部電極24が振動膜43上に密着膜24bを介して積層されており、下部電極24が、白金または白金を含む合金であり、密着膜24bが膜厚80Å以下のチタンである。【選択図】図4
