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X-RAY DETECTOR AND METHOD OF MANUFACTURING THE SAME
专利权人:
Samsung Electronics Co.; Ltd.
发明人:
Changbum LEE,Sunil KIM,Dongwook LEE,Jaechul PARK
申请号:
US14704529
公开号:
US20160100812A1
申请日:
2015.05.05
申请国别(地区):
US
年份:
2016
代理人:
摘要:
A method of manufacturing an X-ray detector includes: applying a mask having an opening on a substrate on which a plurality of charge detection units are positioned; filling the opening with a paste including a photoelectric conversion material that absorbs X-rays to generate charges; and forming a photoconductive layer from the paste by separating the mask from the substrate. A thickness of the paste within the opening is thicker in an area adjacent to at least one edge among edges of the opening than in areas around other edges.
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