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METHODS AND DEVICES FOR TREATING SURFACES WITH SURFACE PLASMA`
专利权人:
Gregory Fridman
发明人:
Gregory Fridman,Alexander Fridman,Alexander F. Gutsol,Gennady Friedman
申请号:
US13256727
公开号:
US20120156091A1
申请日:
2010.03.16
申请国别(地区):
US
年份:
2012
代理人:
摘要:
Methods and devices for treating surfaces of objects using a non-thermal plasma are disclosed herein. The non-thermal plasma is generated through the use of an apparatus configured to generate a non-thermal plasma on its surface. The apparatus is comprised of a substrate that contains one or more electrodes of different polarity. The electrodes are placed within a layer of the substrate acting as a dielectric layer. The apparatus may also have additional layers to contain the dielectric layer. When an appropriate potential, being either an alternating current or pulsed high voltage potential, is applied and removed from the one or more electrodes, the gas on at least one surface of the apparatus becomes ionized and forms a non-thermal plasma. The electrodes can be configured to be of various shapes and sizes to modify or tune the plasma.
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