Method and device for observing a specimen in a field of view of an electron microscope

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专利权人:

发明人:

申请号：

US20040800872

公开号：

US7022989(B2)

申请日:

2004.03.16

申请国别(地区):

美国

年份:

2006

代理人:

摘要：

The present invention provides a method of observing a specimen in a field of view of an electron microscope comprising the acts of illuminating the specimen with an electron beam having a first angle and forming a first transmission image of the specimen in the field of view and adjusting the electron beam to a second angle and forming a second transmission image of the specimen in the field of view and calculating a degree of coincidence between the first and second transmission images.

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