PROBLEM TO BE SOLVED: To provide a plasma generation device and a plasma generation method that increase the generation amount of active species and stabilize the generation amount of active species by stabilizing generation of plasma.SOLUTION: A plasma generation device which includes a plasma electrode part having a pair of electrodes 21, 22 provided with dielectric films 21a, 22a on opposite surfaces, and generates a plasma discharge as a predetermined voltage is applied between the pair of electrodes 21, 22 includes a housing 25 which have fluid circulation holes 21b, 22b formed at places corresponding to the pair of electrodes 21, 22 so that the circulation holes penetrate, and holds the pair of electrodes 21, 22. The housing 25 opens at least a part of a side opening 2M formed with the pair of electrodes 21, 22 to improve drying performance of the dielectric films 21a, 22a.【課題】活性種の生成量を増やすとともに、プラズマの発生を安定化させることで活性種の生成量を安定化させるプラズマ発生装置及びプラズマ発生方法の提供。【解決手段】対向面に誘電体膜２１ａ、２２ａを設けた一対の電極２１、２２を有するプラズマ電極部を備え、一対の電極２１、２２間に所定電圧が印加されてプラズマ放電するものにおいて、一対の電極２１、２２の対応する箇所にそれぞれ流体流通孔２１ｂ、２２ｂを設けてこれらが貫通するように構成するとともに、一対の電極２１、２２を保持する筐体２５を備え、筐体２５が、一対の電極２１、２２により形成される側辺開口２Ｍの少なくとも一部を開放して、誘電体膜２１ａ、２２ａの乾燥性能を向上させる。【選択図】図９
