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凹凸圖形檢出裝置
专利权人:
发明人:
NATSUME, YOSHIO,夏目好夫,夏目好夫
申请号:
TW099133873
公开号:
TWI511054B
申请日:
2010.10.05
申请国别(地区):
TW
年份:
2015
代理人:
摘要:
The present invention aims to provide a highly reliable relief pattern detection device 1, including a slant FOP 3 having an input end surface 4 with which an object surface makes contact and an output end surface 5 substantially parallel to the input end surface 4, an irradiation light source 10 disposed on the output end surface 5 side of the slant FOP 3, for irradiating the output end surface 5 with light, and a CCD camera 11 disposed on the output end surface 5 side of the slant FOP 3, for detecting a relief pattern based on light emitted from the output end surface 5, in which optical axes Rf of optical fibers are inclined so as to create a first angle ± less than 90° in one direction from the output end surface 5 within a predetermined plane substantially perpendicular to the output end surface 5, the irradiation light source 10 irradiates the output end surface 5 with light in a direction to create a second angle ² less than 90° in the other direction from the output end surface 5 within the predetermined plane, and the first angle ± and the second angle ² are set so that light made incident from the output end surface 5 into a core 8 of the optical fiber 6 enters into a cladding 9.本發明之目的在於提供可靠性高的凹凸圖形檢出裝置(1),其具備:斜面FOP(3),係具有對象物表面接觸的輸入端面(4)及與輸入端面(4)大致平行的輸出端面(5);照射光源(10),係配置在斜面FOP(3)的輸出端面(5)側,對輸出端面(5)照射光;及CCD攝影機(11),係配置在斜面FOP(3)的輸出端面(5)側,根據從輸出端面(5)射出的光來檢出凹凸圖形;光纖(6)的光軸(Rf)係於與輸出端面(5)大致正交的預定面內,從輸出端面(5)朝一方向旋轉,傾斜形成未達90°之第1角度α,照射光源(10)係於預定面內,從輸出端面(5)朝另一方向旋轉,從形成未達90°之第2角度β的方向對輸出端面(5)照射光,第1角度α和第2角度β被設定為從輸出端面(5)射入光纖(6)的核芯(8)之光進入包覆層(9)內。2...手指3...斜面FOP4...輸入端面5...輸出端面6...光纖7...吸收體8...核芯9...包覆層S...光軸傾斜方向N...法線A、B、C...箭頭α...傾斜角β...照明角度Rf...光軸
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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