The objective of the present invention relates to bright field STEM, dark field image STEM and EELS observations at high resolution under low acceleration voltage. In the transmission scanning electron microscope equipped with the electron energy loss spectroscope (17), the present invention relates to modifying the positioning of a sample relative to the optical axis direction of a primary electron beam in order to control the capture angle for each of STEM detectors (11, 13) and the electron energy loss spectroscope (17). According to the present invention, a scattering angle that is optimal for each of bright field STEM, dark field STEM, and EELS can be easily controlled while suppressing the occurrence of chromatic aberration accompanying the control of the capture angle.
