NATIONAL CHUNG SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
发明人:
Pan Wen-Chueh,Hsu Tsang-Ming,Li Jen-Chieh,Chen Tsan-Tung,Chiu Chui-Yu,Wei Shih-Shan
申请号：
US201615185076
公开号：
US2016293789(A1)
申请日:
2016.06.17
申请国别(地区):
美国
年份:
2016
代理人:
摘要：
The present disclosure relates to a vapor deposition equipment for fabricating CIGS film, in which a Se vapor deposition module, a In/Ga linear vapor deposition module and a Cu linear vapor deposition module are integrated in an identical vacuum chamber, used for fabricating the CIGS absorber layers on a flexible solar cell substrate by an automatic manufacturing process in accordance with an unwinding module, a heating device, a heat reducing device, a speed-controlling roller module, a cooling module, and a winding module. Moreover, in the present disclosure, a film thickness measuring module is used for measures the thickness of the CIGS chalcopyrite crystalline film on the flexible solar cell substrate, and the thickness data of the CIGS chalcopyrite crystalline film would be transmitted to the electromechanical control module for being references of the parameter modulation of following fabricating process, and such way is so-called APC (Advanced Process Control) system.
