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Method to coat NFT area with highly thermal conducting material in HAMR structure
专利权人:
HGST Netherlands B.V.
发明人:
Torres Eduardo,Hwang Cherngye,Simmons Randy
申请号:
US201514798428
公开号:
US9460738(B1)
申请日:
2015.07.13
申请国别(地区):
美国
年份:
2016
代理人:
Patterson & Sheridan, LLP
摘要:
Embodiments disclosed herein generally relate to a method for forming a HAMR head. The method includes depositing a drop-on-demand mask on a portion of a surface of a slider using a drop-on-demand tool. The surface of the slider includes at least a portion of an NFT. A first protective layer is deposited over a remaining portion of the surface of the slider and over the drop-on-demand mask. The drop-on-demand mask and a portion of the first protective layer disposed on the drop-on-demand mask are removed, exposing at least the portion of the NFT. A second protective layer is deposited on the first protective layer and at least the exposed portion of the NFT. By using the drop-on-demand tool to deposit the drop-on-demand mask, the alignment between the drop-on-demand mask and the portion of the NFT is less stringent, and the drop-on-demand mask can be easily removed using a wiping tool.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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