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ELECTROSTATIC CAPACITY TYPE ULTRASONIC VIBRATOR, MANUFACTURING METHOD THEREOF, AND ELECTROSTATIC CAPACITY TYPE ULTRASONIC PROBE
专利权人:
Olympus Corporation
发明人:
ADACHI, Hideo,SAWADA, Yukihiko,WAKABAYASHI, Katsuhiro,MIZUNUMA, Akiko,IMAHASHI, Takuya,OMURA, Etsuko,OKUNO, Yoshiyuki,OTANI, Shuji,MURAKAMI, Miyuki,NEMOTO, Kiyoshi,SUZUKI, Kozaburo,SHIMODA, Naomi
申请号:
EP05745550
公开号:
EP1761104A4
申请日:
2005.06.02
申请国别(地区):
EP
年份:
2016
代理人:
摘要:
It becomes possible to obtain high sound pressure in a high frequency domain by a capacitive ultrasonic transducer which comprises a membrane 9 on which one electrode 7 is formed, a cavity 13 constructed in its backface, and a substrate 2 on which these are mounted and supported and on whose surface an electrode 12 is provided, on a surface in an ultrasonic transmission and reception side, characterized in that the membrane 9 comprises two or more layers, and at least one layer of them comprises a high dielectric constant film 8.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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