Sun Jennifer Y.,Firouzdor Vahid,Kanungo Biraja Prasad,Cho Tom K.,Achutharaman Vedapuram S.,Zhang Ying
申请号：
US201715712094
公开号：
US2018010235(A1)
申请日:
2017.09.21
申请国别(地区):
美国
年份:
2018
代理人:
摘要：
An article comprises a body and a conformal protective layer on at least one surface of the body. The conformal protective layer is a plasma resistant rare earth oxide film having a thickness of less than 1000 μm, wherein the plasma resistant rare earth oxide film is selected from a group consisting of an Er—Y composition, an Er—Al—Y composition, an Er—Y—Zr composition, and an Er—Al composition.
