A nozzle-type electron beam irradiation device (1) includes a vacuum chamber (2), an electron beam generator (3) disposed in the vacuum chamber (2), and a vacuum nozzle (4) that is connected to the vacuum chamber (2) so as to guide an electron beam (E) from the electron beam generator (3) and emit the electron beam (E) to the outside. The nozzle-type electron beam irradiation device (1) includes a high-vacuum pump (5) capable of sucking gas from the vicinity of the connecting part of the vacuum nozzle (4) in the vacuum chamber (2).
