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構造物体を検査するための光学装置及び方法
专利权人:
ナノテック ソリュシオンNANOTEC SOLUTION
发明人:
フレスケ ジル
申请号:
JP20130506713
公开号:
JP6273142(B2)
申请日:
2011.04.19
申请国别(地区):
日本
年份:
2018
代理人:
摘要:
A microscope device for inspecting structured objects, including: a camera; an optical imager capable of producing, on the camera, an image of the object according to a field of view, and including a distal lens arranged on the side of the object; and a low-coherence infrared interferometer including a measurement beam capable of producing measurements by means of interferences between retroreflections of the measurement beam and at least one separate optical reference. The device also includes coupler for injecting the measurement beam into the optical imaging means in such a way that the beam passes through the distal lens, and the low-coherence infrared interferometer is balanced in such a way that only the measurement beam retroreflections, taking place at optical distances close to the optical distance covered by the beam to the object, produce measurements.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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