The purpose of the present invention is to provide a high-resolution charged particle beam device allowing the rotational movement of a spherical support part from a side entry type sample stage to be performed highly accurately. The charged particle beam device comprises: a sample holding portion (132); a spherical support part (100) rotatably supporting the sample holding portion (132); a spherical support bearing part (110) serving as a rotation axis bearing; and, disposed between the spherical support part (100) and the spherical support bearing part (110), a vacuum seal member (120) for sealing the sample holding portion (132) in vacuum, and a support adjustment part (160) for supporting the weight of the spherical support part (100).
