SAMPLE HOLDER FOR SCANNING ELECTRON MICROSCOPE, SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION SYSTEM, AND SCANNING ELECTRON MICROSCOPE IMAGE OBSERVATION METHOD
National Institute of Advanced Industrial Science and Technology
发明人:
OGURA, Toshihiko
申请号：
EP20140783084
公开号：
EP2985780(A4)
申请日:
2014.03.24
申请国别(地区):
欧洲专利局
年份:
2016
代理人:
摘要：
A water solution (20) in which an observation sample (10) is, for example, dissolved is sandwiched on a first insulative thin film (203) side provided under a conductive thin film 201. When an electron beam incident part is charged minus, electric dipoles of water molecules are arrayed along a potential gradient. Electric charges are also generated on the surface of a second insulative thin film (204). The electric charges are detected by a terminal section (210) and changes to a measurement signal. In a state in which an electron beam (102) is blocked, the minus potential disappears. Consequently, the electric charges on the surface of the first insulative thin film (203) also disappear, and the measurement signal output from the terminal section (210) changes to 0.
