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PLASMA PROCESSING-APPARATUS PROCESSING OBJECT SUPPORT PLATFORM, PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING METHOD
专利权人:
Toshiba Memory Corporation
发明人:
ETO Hideo
申请号:
US201615258628
公开号:
US2018012784(A1)
申请日:
2016.09.07
申请国别(地区):
美国
年份:
2018
代理人:
摘要:
According to one embodiment, a plasma processing-apparatus processing object support platform includes a lower plate, an upper plate, and a variable condenser. The lower plate is electrically conductive. The upper plate is provided on the lower plate. A processing object is placed on an upper surface of the upper plate. The variable condenser is provided along a circumferential direction of the lower plate in a region at an upper outer circumferential vicinity of the lower plate. The region has an annular configuration. The variable condenser includes a first capacitance element and a second capacitance element disposed respectively on an inner circumferential side and an outer circumferential side in the region having the annular configuration. Mutually-different control voltages are suppliable to the first capacitance element and the second capacitance element.
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中国工程科技知识中心
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http://www.ckcest.cn/home/

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