PROBLEM TO BE SOLVED: To provide a non-fixed type electric heating holder capable of simultaneously performing stress and distortion measurement and structural analysis using RHEED for a thin film. SOLUTION: A non-fixed type electric heating holder includes: a holder body; two sample installation pedestals fixedly installed so as to be electrically insulated from the holder body; two electrodes provided corresponding to the two sample installation pedestals, and capable of hooking a sample between the electrodes and electrically heating the sample; electrode holding means for slidably holding positions of the two electrodes in a direction perpendicular to the sample installation pedestals; and two grounding plates provided corresponding to the two sample installation pedestals and electrically grounded to the holder body, for preventing gravity falling of the sample when the holder body is directed downward, and having claws electrically connected to the sample. COPYRIGHT: (C)2013,JPO&INPIT
