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Adapter for replaceable lamp
专利权人:
APPLIED MATERIALS, INC.
发明人:
Ranish Joseph M.,Serebryanov Oleg V.
申请号:
US201414546103
公开号:
US9922815(B2)
申请日:
2014.11.18
申请国别(地区):
美国
年份:
2018
代理人:
Patterson + Sheridan LLP
摘要:
Embodiments of the present disclosure generally relate to an improved adapter for simplified lamps for use as a source of heat radiation in a rapid thermal processing (RTP) chamber. In one embodiment, a lamp assembly is provided. The lamp element includes a capsule having a filament disposed therein, a press seal extending from the capsule, and an adapter having a receptacle contoured to receive at least a portion of the press seal, wherein the press seal is removably engaged with the adapter.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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