Blouch Stephen C.,Arnold Paul C.,Brucker Gerardo A.,Graba Wesley J.,Hansen Douglas C.
申请号：
US201514795706
公开号：
US2017010171(A1)
申请日:
2015.07.09
申请国别(地区):
美国
年份:
2017
代理人:
摘要：
Devices and corresponding methods can be provided to test an ionization gauge, such as a hot cathode ionization gauge, for leakage currents and to respond to the leakage currents to improve pressure measurement accuracy. Responding to the leakage current can include applying a correction to a pressure measurement signal generated by the gauge based on the leakage current. Responding to the leakage current can also include removing contamination causing the leakage current, where the contamination is on electrical feedthrough insulators or other gauge surfaces. Testing and correcting for leakage currents and removing contamination can be completed with the ionization pressure gauge in situ in its environment of use, and while the gauge remains under vacuum.
