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PROCESS FOR PRODUCING ORGANIC-INORGANIC LAMINATES
专利权人:
BASF Coatings GmbH
发明人:
AHLF, Maraike,EICKEMEYER, Felix,KLOTZ, Stephan
申请号:
EP20150721225
公开号:
EP3155142(A2)
申请日:
2015.05.07
申请国别(地区):
欧洲专利局
年份:
2017
代理人:
摘要:
The present invention is in the field of processes for producing organic-inorganic laminates by atomic layer deposition. In particular the present invention relates to a process for producing a laminate comprising moving a substrate relative to at least two separate orifices arranged along the relative moving trajectory wherein through at least one orifice an organic compound in the gaseous state is passed towards the surface of the substrate and through at least one other orifice a (semi)metal-containing compound in the gaseous state is passed towards the surface of the substrate and wherein the orifices are mounted on a rotating drum.
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