Salt and process for producing acid generator

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专利权人:

Isao Yoshida

发明人:

Isao Yoshida,Koji Ichikawa

申请号：

US13025637

公开号：

US08236842B2

申请日:

2011.02.11

申请国别(地区):

US

年份:

2012

代理人:

摘要：

A salt represented by the formula (I0):wherein Q1 and Q2 each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L1 represents a divalent C1-C17 hydrocarbon group in which one or more —CH2— can be replaced by —O— or —CO—, m represents 1 or 2, and Zm+ represents m-valent organic or inorganic cation.

来源网站：

中国工程科技知识中心

来源网址：

http://www.ckcest.cn/home/