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Spectral data processing apparatus, spectral data processing method, and recording medium
专利权人:
Canon Kabushiki Kaisha
发明人:
Iwasaki Kota,Tsuzuki Hidetoshi
申请号:
US201414307913
公开号:
US9696203(B2)
申请日:
2014.06.18
申请国别(地区):
美国
年份:
2017
代理人:
Canon U.S.A. Inc., IP Division
摘要:
A spectral data processing apparatus includes an analyzer configured to perform principal component analysis of spectral data acquired for each of a plurality of regions of a sample, wherein the analyzer obtains an eigenvector by performing the principal component analysis of first spectral data of a first region out of the plurality of regions, and performs the principal component analysis of second spectral data of a second region different from the first region out of the plurality of regions using the obtained eigenvector.
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