This invention provides a particle beam irradiation apparatus capable of performing a scanning of electro particle beams with a high degree of freedom from a low speed to a high speed accurately by using a plurality of sets of scanning electromagnets. In the particle beam irradiation apparatus of this invention, an incident charged particle beam is scanned along a target track extending in two directions of X and Y directions perpendicular to the direction of travel of the charged particle, and a plurality of sets of the scanning electromagnets for scanning the charged particle beam in two directions are provided. The target track is to give time-series target track data in which target irradiation positions corresponding to time, and command values for respective scanning electromagnets of the plurality of sets of the scanning electromagnets are produced according to the plurality of data of frequently divided time-series target track data.本發明提供一種使用複數組掃描電磁鐵而可實現高精度、且從低速到高速之自由度高的帶電粒子束之掃描的粒子線照射裝置。本發明之粒子線照射裝置係使所射入的帶電粒子束在與帶電粒子束之行進方向垂直的X方向及Y方向兩個方向的目標軌道進行掃描，而照射在照射對象者，其中，具備複數組使帶電粒子束朝兩個方向進行掃描的掃描電磁鐵組，目標軌道係由對應於時間之目標照射位置所決定的時序目標軌道資料所提供，並且根據對時序目標軌道資料進行頻率分割後的複數個資料，生成複數組掃描電磁鐵之各個掃描電磁鐵的指令值。
