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SYSTEM AND METHOD FOR IMPROVING DICING QUALITY FOR BONDED WAFER PAIRS
专利权人:
INTEGRATED DEVICE TECHNOLOGY, INC.
发明人:
Kulkarni Srikanth,Patel Viresh P.
申请号:
US201514967050
公开号:
US2017170159(A1)
申请日:
2015.12.11
申请国别(地区):
美国
年份:
2017
代理人:
摘要:
A method for manufacturing a plurality of die pairs includes providing a first wafer including a plurality of spaced apart first dies arranged in a first array including a first, first die row and a second, first die row spaced apart by a first portion of a first row channel; providing a second wafer including a plurality of spaced apart second dies arranged in a second array including a first, second die row and a second, second die row spaced apart by a second portion of the first row channel; connecting the first wafer to the second wafer with a connector assembly to form a wafer pair such that the first dies and the second dies cooperate to form the plurality of die pairs; positioning a first support assembly between the first wafer and the second wafer to rigidly support the first wafer relative to the second wafer; and cutting along the first row channel with a blade to separate the plurality of die pairs from one another.
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