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Piezoelectric thin film, piezoelectric thin film element, piezoelectric actuator, piezoelectric sensor, hard disk drive, and inkjet printer head
专利权人:
TDK株式会社
发明人:
廣瀬 維子,大槻 史朗
申请号:
JP2015196364
公开号:
JP6578866B2
申请日:
2015.10.02
申请国别(地区):
JP
年份:
2019
代理人:
摘要:
A piezoelectric film containing (K,Na)NbO3 as the main component, wherein, when a surface of the piezoelectric film was observed in a field view within a specified range, a plurality of first crystals and a plurality of second crystals are arranged in the surface of the piezoelectric film, wherein, the first crystal has a slender shape orientating toward the first orientation along the surface, and the second crystal has a slender shape orientating toward the second orientation which crosses with the first orientation along the surface.
来源网站:
中国工程科技知识中心
来源网址:
http://www.ckcest.cn/home/

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