Thin-film piezoelectric element, thin-film piezoelectric actuator, thin-film piezoelectric sensor, hard disk drive, and inkjet printer apparatus

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专利权人:

发明人:

Katsuyuki Kurachi,Yasuhiro Aida,Hitoshi Sakuma,Kazuhiko Maejima

申请号：

US14047649

公开号：

US09277869B2

申请日:

2013.10.07

申请国别(地区):

US

年份:

2016

代理人:

摘要：

There are provided a thin-film piezoelectric element including a piezoelectric thin film which has an alkali niobate-based perovskite structure represented by the composition formula (K1-w-xNawSrx)m(Nb1-yZry)O3 and which is preferentially oriented to (001), and a pair of electrode films that sandwich the piezoelectric thin film, a thin-film piezoelectric actuator, and a thin-film piezoelectric sensor each including the thin-film piezoelectric element.

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中国工程科技知识中心

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