POLISHING PAD LAMINATED BODY AND DOUBLE-SIDED PRESSURE SENSITIVE ADHESIVE SHEET
- 专利权人:
- TOYO INK MFG CO LTD;NITTA HAAS INC
- 发明人:
- NAKAO TATSUYA,TAKAHASHI HIDEYUKI,MACHIDA TOSHINORI,KATAO YOSHIAKI,YOKOMICHI YASUJI
- 申请号：
- JP20030286783
- 公开号：
- JP2005052936(A)
- 申请日:
- 2003.08.05
- 申请国别(地区):
- 日本
- 年份:
- 2005
- 代理人:
- 摘要：
PROBLEM TO BE SOLVED: To provide a polishing pad laminated body stably stickable even to a surface-protected polishing device by a hardly adhesive material, and capable of uniformly polishing whole the surface of a wafer to reduce a height difference.
SOLUTION: This polishing pad laminated body 10 includes one layer of at least a polishing pad 1 and one layer of a pressure sensitive adhesive layer (2-1) for sticking the polishing device. The pressure sensitive adhesive layer for sticking the polishing device, is composed of a silicone pressure sensitive adhesive formed by cross-linking a silicone resin having a vinyl group in a molecule.
COPYRIGHT: (C)2005,JPO&NCIPI
- 来源网站：
- 中国工程科技知识中心
