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Plate, transducer and methods for making and operating a transducer
专利权人:
Infineon Technologies AG
发明人:
Dehe Alfons
申请号:
US201514962949
公开号:
US9876446(B2)
申请日:
2015.12.08
申请国别(地区):
美国
年份:
2018
代理人:
Slater Matsil, LLP
摘要:
A plate, a transducer, a method for making a transducer, and a method for operating a transducer are disclosed. An embodiment comprises a plate comprising a first material layer comprising a first stress, a second material layer arranged beneath the first material layer, the second material layer comprising a second stress, an opening arranged in the first material layer and the second material layer, and an extension extending into opening, wherein the extension comprises a portion of the first material layer and a portion of the second material layer, and wherein the extension is curved away from a top surface of the plate based on a difference in the first stress and the second stress.
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